Specifications

LIP 382

Measuring standard

Coefficient of linear expansion

DIADUR phase grating on Zerodur glass ceramic; grating period 0.512 µm
?therm = (0±0.1) x 10–6 K–1

Accuracy grade

±0.5 µm (higher accuracy grades upon request)

Baseline error

? ±0.075 µm/5 mm

Measuring length ML* in mm

70 120 150 170 220 270

Reference marks

No

Interface

  1 VPP

Integrated interpolation

Signal period

–

0.128 µm

Cutoff frequency –3 dB

? 1 MHz

Scanning frequency*

Edge separation a

–

Traversing speed

? 7.6 m/min

Interpolation error

Position noise RMS

±0.01 nm

0.06 nm (1 MHz1))

Laser

Scanning head and scale mounted: Class 1

Scanning head not mounted: Class 3B

Laser diode used: Class 3B

Electrical connection

0.5 m cable to interface electronics (APE), separate adapter cable (1 m/3 m/6 m/9 m)
connectable to APE

Cable length

See interface description, but ? 30 m (with HEIDENHAIN cable)

Power supply

DC 5 V ±0.25 V

Current consumption

< 190 mA

Vibration 55 Hz to 2000 Hz

Shock 11 ms

? 4 m/s2 (EN 60068-2-6)

? 50 m/s2 (EN 60068-2-27)

Operating temperature

0 °C to 40 °C

Mass Scanning head

Interface electronics

Linear scale

Connecting cable

150 g

100 g

ML 70 mm: 260 g, ML ? 150 mm: 700 g

38 g/m

* Please select when ordering

1) –3 dB cutoff frequency of the subsequent electronics