Specifications
LIP 481 V
LIP 481 U
Areas of application
High vacuum, up to 1 · 10–7 mbar
Ultrahigh vacuum, up to 1 · 10–11 mbar
Measuring standard*
Coefficient of linear expansion
SUPRADUR phase grating on glass or Zerodur glass ceramic
Glass: ?therm 8 · 10–6 K–1; Zerodur glass ceramic: ?therm (0 ± 0.1) · 10–6 K–1
Accuracy grade*
±1 µm, ±0.5 µm
Baseline error
? ±0.175 µm/5 mm
Measuring length ML* in mm
70 120 170 220 270 320 370 420
Reference marks
One at midpoint of measuring length
Output signals
1 VPP
Signal period
2 µm
Cutoff frequency –3 dB
? 300 kHz
Traversing speed
36 m/min
Interpolation error
Position noise RMS
±7 nm
2 nm (450 kHz)
Supply voltage
Current consumption
DC 5 V ±5%
< 190 mA
Electrical connection
15-pin D-sub connector (male); interface electronics integrated in connector
Housing feed-through* (see page 4)
None (interface electronics in a vacuum)
D-sub connector (not included in delivery; interface electronics not in a vacuum)
Cable length of scanning head to APE*
0.5 m or 1 m
0.5 m or 1 m to the housing feed-through and 0.5 m to the APE
Other cable lengths on request, but ? 3 m between scanning head and APE
Cable length after APE
? 20 m (with HEIDENHAIN cable)
Vibration 55 Hz to 2000 Hz
Shock 11 ms
? 200 m/s2 (EN 60068-2-6)
? 500 m/s2 (EN 60068-2-27)
Operating temperature
0 °C to 40 °C
Baking temperature
100 °C
120 °C
Materials
PCB: Ceramic
Adhesives: UHV-compatible, temperature resistant
Mass Scanning head
Connector
Scale
Connecting cable
50 g (without cable)
32 g; with integrated interface electronics: 140 g
5.6 g + 0.2 g/mm measuring length
38 g/m
* Please select when ordering
