Specifications
LIP 382
Measuring standard
Coefficient of linear expansion
DIADUR phase grating on Zerodur glass ceramic; grating period 0.512 µm
?therm = (0±0.1) x 10–6 K–1
Accuracy grade
±0.5 µm (higher accuracy grades upon request)
Baseline error
? ±0.075 µm/5 mm
Measuring length ML* in mm
70 120 150 170 220 270
Reference marks
No
Interface
1 VPP
Integrated interpolation
Signal period
–
0.128 µm
Cutoff frequency –3 dB
? 1 MHz
Scanning frequency*
Edge separation a
–
Traversing speed
? 7.6 m/min
Interpolation error
Position noise RMS
±0.01 nm
0.06 nm (1 MHz1))
Laser
Scanning head and scale mounted: Class 1
Scanning head not mounted: Class 3B
Laser diode used: Class 3B
Electrical connection
0.5 m cable to interface electronics (APE), separate adapter cable (1 m/3 m/6 m/9 m)
connectable to APE
Cable length
See interface description, but ? 30 m (with HEIDENHAIN cable)
Power supply
DC 5 V ±0.25 V
Current consumption
< 190 mA
Vibration 55 Hz to 2000 Hz
Shock 11 ms
? 4 m/s2 (EN 60068-2-6)
? 50 m/s2 (EN 60068-2-27)
Operating temperature
0 °C to 40 °C
Mass Scanning head
Interface electronics
Linear scale
Connecting cable
150 g
100 g
ML 70 mm: 260 g, ML ? 150 mm: 700 g
38 g/m
* Please select when ordering
1) –3 dB cutoff frequency of the subsequent electronics
